JPS5483778A - Mos semiconductor device and its manufacture - Google Patents
Mos semiconductor device and its manufactureInfo
- Publication number
- JPS5483778A JPS5483778A JP15196877A JP15196877A JPS5483778A JP S5483778 A JPS5483778 A JP S5483778A JP 15196877 A JP15196877 A JP 15196877A JP 15196877 A JP15196877 A JP 15196877A JP S5483778 A JPS5483778 A JP S5483778A
- Authority
- JP
- Japan
- Prior art keywords
- film
- substrate
- drain
- source
- punch
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 239000004065 semiconductor Substances 0.000 title 1
- 239000000758 substrate Substances 0.000 abstract 3
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 abstract 2
- 229910052698 phosphorus Inorganic materials 0.000 abstract 2
- 239000011574 phosphorus Substances 0.000 abstract 2
- 238000005530 etching Methods 0.000 abstract 1
- 150000004767 nitrides Chemical class 0.000 abstract 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 abstract 1
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15196877A JPS5483778A (en) | 1977-12-16 | 1977-12-16 | Mos semiconductor device and its manufacture |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15196877A JPS5483778A (en) | 1977-12-16 | 1977-12-16 | Mos semiconductor device and its manufacture |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5483778A true JPS5483778A (en) | 1979-07-04 |
JPS6237543B2 JPS6237543B2 (en]) | 1987-08-13 |
Family
ID=15530143
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15196877A Granted JPS5483778A (en) | 1977-12-16 | 1977-12-16 | Mos semiconductor device and its manufacture |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5483778A (en]) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5713769A (en) * | 1980-06-30 | 1982-01-23 | Fujitsu Ltd | Semiconductor device and manufacture thereof |
JPS57115871A (en) * | 1980-11-24 | 1982-07-19 | Western Electric Co | Method of producing semiconductor device |
JPS57141963A (en) * | 1981-02-27 | 1982-09-02 | Toshiba Corp | Manufacture of semiconductor device |
JPS6042866A (ja) * | 1983-08-19 | 1985-03-07 | Toshiba Corp | 半導体装置及びその製造方法 |
-
1977
- 1977-12-16 JP JP15196877A patent/JPS5483778A/ja active Granted
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5713769A (en) * | 1980-06-30 | 1982-01-23 | Fujitsu Ltd | Semiconductor device and manufacture thereof |
JPS57115871A (en) * | 1980-11-24 | 1982-07-19 | Western Electric Co | Method of producing semiconductor device |
JPS57141963A (en) * | 1981-02-27 | 1982-09-02 | Toshiba Corp | Manufacture of semiconductor device |
JPS6042866A (ja) * | 1983-08-19 | 1985-03-07 | Toshiba Corp | 半導体装置及びその製造方法 |
Also Published As
Publication number | Publication date |
---|---|
JPS6237543B2 (en]) | 1987-08-13 |
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